From donghun.choi at snf.stanford.edu Tue Oct 2 22:39:21 2007 From: donghun.choi at snf.stanford.edu (donghun.choi at snf.stanford.edu) Date: Tue, 2 Oct 2007 22:39:21 -0700 Subject: Problem epi2 SNF 2007-10-02 22:39:21: Low Temperature deviation fault Message-ID: it happend during ramp down to 350 C. From mtang at snf.stanford.edu Wed Oct 3 09:08:45 2007 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Wed, 3 Oct 2007 09:08:45 -0700 Subject: Shutdown epi2 SNF 2007-10-03 09:08:45: Needs HCl bottle change Message-ID: From maurice at snf.stanford.edu Wed Oct 3 10:31:51 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 3 Oct 2007 10:31:51 -0700 Subject: Comment epi2 SNF 2007-09-07 08:15:43: Switched HCl cylinder Message-ID: logged From maurice at snf.stanford.edu Wed Oct 3 10:32:48 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 3 Oct 2007 10:32:48 -0700 Subject: Problem epi2 SNF 2007-09-10 16:31:46: Upper temp 100c higher than setpoint Message-ID: have not seen this problem this week From eenriquez at snf.stanford.edu Wed Oct 3 12:47:52 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 3 Oct 2007 12:47:52 -0700 Subject: Shutdown epi2 SNF 2007-10-03 09:08:45: Needs HCl bottle change Message-ID: Installed new HCl cylinder. Had to tighten DISS fitting to 50 ft-lbs of torque to seal (spec is 35). At 35 ft-lbs the leak rate was 1e-5 atm-cc/min . From rshyam at snf.stanford.edu Wed Oct 3 20:02:30 2007 From: rshyam at snf.stanford.edu (rshyam at snf.stanford.edu) Date: Wed, 3 Oct 2007 20:02:30 -0700 Subject: Problem epi2 SNF 2007-10-03 20:02:30: No DCS flow Message-ID: No DCS flow into vent DCS flows into chamber though but I dont want to run it as it may be indicative of a more serious problem From eenriquez at snf.stanford.edu Thu Oct 4 12:26:36 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 4 Oct 2007 12:26:36 -0700 Subject: Problem epi2 SNF 2007-10-03 20:02:30: No DCS flow Message-ID: Adjusted the backpressure regulator. The pressure spec is 2-5 psi. The press was set in the 20 psi range. From maurice at snf.stanford.edu Thu Oct 4 16:44:46 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 4 Oct 2007 16:44:46 -0700 Subject: Problem epi2 SNF 2007-10-02 22:39:21: Low Temperature deviation fault Message-ID: logged From maurice at snf.stanford.edu Thu Oct 4 16:56:41 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 4 Oct 2007 16:56:41 -0700 Subject: Problem epi2 SNF 2007-09-13 21:47:38: Dopants problem Message-ID: Dopant mix backpressure regulators adjusted. D-Dop1, Dop1 and Dop2 all flow to the vent and to the chamber when called for in a recipe. D-Dop2 not working. To verify dopants are working, program "DOP1 FLOW" has been created as a cleaning recipe (put it in place of GE etch or Etch coat-cha). It will: Flow DOP1 to vent for 20 sec Flow DOP1 to chamber A for 20 sec Flow DOP2 to vent for 20 sec Flow DOP2 to chamber A for 20 sec From maurice at snf.stanford.edu Thu Oct 4 16:58:38 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 4 Oct 2007 16:58:38 -0700 Subject: Problem epi2 SNF 2007-09-22 02:33:42: dopant problem Message-ID: Dopant mix backpressure regulators adjusted. D-Dop1, Dop1 and Dop2 all flow to the vent and to the chamber when called for in a recipe. D-Dop2 not working. To verify dopants are working, program "DOP1 FLOW" has been created as a cleaning recipe (put it in place of GE etch or Etch coat-cha). It will: Flow DOP1 to vent for 20 sec Flow DOP1 to chamber A for 20 sec Flow DOP2 to vent for 20 sec Flow DOP2 to chamber A for 20 sec From maurice at snf.stanford.edu Thu Oct 4 16:58:51 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 4 Oct 2007 16:58:51 -0700 Subject: Comment epi2 SNF 2007-09-28 14:29:42: Installed new Germane cylinder Message-ID: logged From ehe at snf.stanford.edu Sun Oct 7 20:22:05 2007 From: ehe at snf.stanford.edu (ehe at snf.stanford.edu) Date: Sun, 7 Oct 2007 20:22:05 -0700 Subject: Comment epi2 SNF 2007-10-07 20:22:05: main h2 supply pressure high? Message-ID: warning from epi: "Main H2 supply pressure at 28.9 psi is above maximum 29 psi required" From ehe at snf.stanford.edu Mon Oct 8 10:03:40 2007 From: ehe at snf.stanford.edu (ehe at snf.stanford.edu) Date: Mon, 8 Oct 2007 10:03:40 -0700 Subject: Comment epi2 SNF 2007-10-08 10:03:40: error msg? Message-ID: Received msg: "Chamber A SiD rp pressure not stabilized" when starting recipe. Not sure what this is, didn't seem to affect recipe for the worse. From yuhykr at snf.stanford.edu Tue Oct 9 03:42:38 2007 From: yuhykr at snf.stanford.edu (yuhykr at snf.stanford.edu) Date: Tue, 9 Oct 2007 03:42:38 -0700 Subject: Problem epi2 SNF 2007-10-09 03:42:37: chamber is isolated Message-ID: During clean recipe, pressure error came out.. and went isolated. I unloaded my wafe. I tried to recover toward online state. However, "chamber A lift can't reach process position" error came out.... Still isolated state!! From yuhykr at snf.stanford.edu Tue Oct 9 03:58:34 2007 From: yuhykr at snf.stanford.edu (yuhykr at snf.stanford.edu) Date: Tue, 9 Oct 2007 03:58:34 -0700 Subject: Shutdown epi2 SNF 2007-10-09 03:58:33: Chamber A lift can't reach process position Message-ID: From eenriquez at snf.stanford.edu Tue Oct 9 08:07:58 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 9 Oct 2007 08:07:58 -0700 Subject: Shutdown epi2 SNF 2007-10-09 03:58:33: Chamber A lift can't reach process position Message-ID: Rehomed the lift and placed chamber online. Chamber is currently in Hot idle. From eenriquez at snf.stanford.edu Tue Oct 9 08:08:25 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 9 Oct 2007 08:08:25 -0700 Subject: Problem epi2 SNF 2007-10-09 03:42:37: chamber is isolated Message-ID: Rehomed the lift and placed chamber online. Chamber is currently in Hot idle. From maurice at snf.stanford.edu Tue Oct 9 15:15:08 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 9 Oct 2007 15:15:08 -0700 Subject: Shutdown epi2 SNF 2007-10-09 15:15:07: bulb failure Message-ID: upper inner zone From maurice at snf.stanford.edu Tue Oct 9 16:36:05 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 9 Oct 2007 16:36:05 -0700 Subject: Shutdown epi2 SNF 2007-10-09 15:15:07: bulb failure Message-ID: reset system. seems ok From mmessana at snf.stanford.edu Tue Oct 9 20:21:41 2007 From: mmessana at snf.stanford.edu (mmessana at snf.stanford.edu) Date: Tue, 9 Oct 2007 20:21:41 -0700 Subject: Problem epi2 SNF 2007-10-09 20:21:40: dopant problems Message-ID: Despite several attempts D-DOP1 would not go above 5sccm --> resulted in flow deviation error and bulb error. DOP1 would not run either --> resulted in an error state that I did not recognize. Chamber A went into "isolated" state after automatically flowing some nitrogen. Took a half hour to get back to original state and get our wafer out. From maurice at snf.stanford.edu Wed Oct 10 14:40:08 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 10 Oct 2007 14:40:08 -0700 Subject: Comment epi2 SNF 2007-10-10 14:40:07: Lamp failure Message-ID: Lamp falure error...rest system...looks okay From gunjim at snf.stanford.edu Wed Oct 10 14:50:12 2007 From: gunjim at snf.stanford.edu (gunjim at snf.stanford.edu) Date: Wed, 10 Oct 2007 14:50:12 -0700 Subject: Problem epi2 SNF 2007-10-10 14:50:11: CHA bulb failure Message-ID: Again it showed the lamp bulb failure. This time after I brought to active idle. I reset CHA. From gunjim at snf.stanford.edu Wed Oct 10 16:09:58 2007 From: gunjim at snf.stanford.edu (gunjim at snf.stanford.edu) Date: Wed, 10 Oct 2007 16:09:58 -0700 Subject: Shutdown epi2 SNF 2007-10-10 16:09:57: Lamp failure Message-ID: I have tried several times to get to active idle but still showed"ChamberA bulb failed in UPPER OUTER zone". From eenriquez at snf.stanford.edu Thu Oct 11 07:33:42 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 11 Oct 2007 07:33:42 -0700 Subject: Comment epi2 SNF 2007-10-11 07:33:42: Replaced HCl cylinder Message-ID: From maurice at snf.stanford.edu Thu Oct 11 14:18:10 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 11 Oct 2007 14:18:10 -0700 Subject: Comment epi2 SNF 2007-10-11 14:18:09: checking upper bank Message-ID: checking upper bank for bad lamps From maurice at snf.stanford.edu Fri Oct 12 15:39:41 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 12 Oct 2007 15:39:41 -0700 Subject: Comment epi2 SNF 2007-10-10 14:40:07: Lamp failure Message-ID: logged From maurice at snf.stanford.edu Fri Oct 12 15:40:59 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 12 Oct 2007 15:40:59 -0700 Subject: Problem epi2 SNF 2007-10-09 20:21:40: dopant problems Message-ID: User believes he was asking for too low of a flow...15 sccm on a 500sccm MFC From maurice at snf.stanford.edu Fri Oct 12 15:41:38 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 12 Oct 2007 15:41:38 -0700 Subject: Comment epi2 SNF 2007-10-07 20:22:05: main h2 supply pressure high? Message-ID: normal message From maurice at snf.stanford.edu Fri Oct 12 15:41:57 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 12 Oct 2007 15:41:57 -0700 Subject: Comment epi2 SNF 2007-10-08 10:03:40: error msg? Message-ID: logged From maurice at snf.stanford.edu Fri Oct 12 15:46:59 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 12 Oct 2007 15:46:59 -0700 Subject: Comment epi2 SNF 2007-10-11 14:18:09: checking upper bank Message-ID: Checked resistance in all 10 heating zones. All zones were ~2.0 ohms. Manual states that below 5 ohms is normal. After starting up again the system still gave upper lamp failure when chamber went above 460 degrees. The zone fault tolerence was increased from 17% (the default) to 20%. The system now heats up to normal. From maurice at snf.stanford.edu Fri Oct 12 15:47:17 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 12 Oct 2007 15:47:17 -0700 Subject: Shutdown epi2 SNF 2007-10-10 16:09:57: Lamp failure Message-ID: Checked resistance in all 10 heating zones. All zones were ~2.0 ohms. Manual states that below 5 ohms is normal. After starting up again the system still gave upper lamp failure when chamber went above 460 degrees. The zone fault tolerence was increased from 17% (the default) to 20%. The system now heats up to normal. From maurice at snf.stanford.edu Fri Oct 12 15:47:31 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 12 Oct 2007 15:47:31 -0700 Subject: Problem epi2 SNF 2007-10-10 14:50:11: CHA bulb failure Message-ID: Checked resistance in all 10 heating zones. All zones were ~2.0 ohms. Manual states that below 5 ohms is normal. After starting up again the system still gave upper lamp failure when chamber went above 460 degrees. The zone fault tolerence was increased from 17% (the default) to 20%. The system now heats up to normal. From maurice at snf.stanford.edu Fri Oct 12 15:48:55 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 12 Oct 2007 15:48:55 -0700 Subject: Comment epi2 SNF 2007-10-12 15:48:54: dome clear Message-ID: Dome inspected while checking lamps. From maurice at snf.stanford.edu Fri Oct 12 15:49:10 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 12 Oct 2007 15:49:10 -0700 Subject: Comment epi2 SNF 2007-09-12 09:16:49: Dome looks clear Message-ID: logged From maurice at snf.stanford.edu Fri Oct 12 15:49:48 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 12 Oct 2007 15:49:48 -0700 Subject: Comment epi2 SNF 2007-10-12 15:49:48: Burnbox:sparkplug changed Message-ID: From mmessana at snf.stanford.edu Fri Oct 12 19:35:55 2007 From: mmessana at snf.stanford.edu (mmessana at snf.stanford.edu) Date: Fri, 12 Oct 2007 19:35:55 -0700 Subject: Problem epi2 SNF 2007-10-12 19:35:55: Load Lock A Stepper Motor Error Message-ID: From emyers at snf.stanford.edu Fri Oct 12 19:49:19 2007 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Fri, 12 Oct 2007 19:49:19 -0700 Subject: Problem epi2 SNF 2007-10-12 19:49:18: No HCl Message-ID: HCl alarm in cabinet. HCl has been shutdown until it can be looked at on Monday. From koba at snf.stanford.edu Fri Oct 12 21:49:09 2007 From: koba at snf.stanford.edu (koba at snf.stanford.edu) Date: Fri, 12 Oct 2007 21:49:09 -0700 Subject: Problem epi2 SNF 2007-10-12 21:49:09: Load Lock A & B Message-ID: Not only load lock A but also load lock B did not open. From yuhykr at snf.stanford.edu Sat Oct 13 00:03:47 2007 From: yuhykr at snf.stanford.edu (yuhykr at snf.stanford.edu) Date: Sat, 13 Oct 2007 00:03:47 -0700 Subject: Shutdown epi2 SNF 2007-10-13 00:03:47: impossible to load wafer... Message-ID: From eenriquez at snf.stanford.edu Mon Oct 15 08:25:51 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 15 Oct 2007 08:25:51 -0700 Subject: Problem epi2 SNF 2007-10-12 21:49:09: Load Lock A & B Message-ID: Rehomed load lock A and B elevators. From eenriquez at snf.stanford.edu Mon Oct 15 08:26:12 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 15 Oct 2007 08:26:12 -0700 Subject: Problem epi2 SNF 2007-10-12 19:35:55: Load Lock A Stepper Motor Error Message-ID: Rehomed load lock A and B elevators. From eenriquez at snf.stanford.edu Mon Oct 15 08:26:20 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 15 Oct 2007 08:26:20 -0700 Subject: Shutdown epi2 SNF 2007-10-13 00:03:47: impossible to load wafer... Message-ID: Rehomed load lock A and B elevators. From eenriquez at snf.stanford.edu Mon Oct 15 08:27:34 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 15 Oct 2007 08:27:34 -0700 Subject: Shutdown epi2 SNF 2007-10-15 08:27:34: No HCl Message-ID: From maurice at snf.stanford.edu Mon Oct 15 14:51:46 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 15 Oct 2007 14:51:46 -0700 Subject: Shutdown epi2 SNF 2007-10-15 14:51:45: Burn box faults for low H2 pressur Message-ID: From maurice at snf.stanford.edu Wed Oct 17 17:33:24 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 17 Oct 2007 17:33:24 -0700 Subject: Shutdown epi2 SNF 2007-10-15 14:51:45: Burn box faults for low H2 pressur Message-ID: Elmer adjusted H2 flow (40) From maurice at snf.stanford.edu Wed Oct 17 17:34:57 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 17 Oct 2007 17:34:57 -0700 Subject: Shutdown epi2 SNF 2007-10-15 08:27:34: No HCl Message-ID: C&C rebuilt venturi on the "good" panel (the other panel will be replaced) From maurice at snf.stanford.edu Wed Oct 17 17:35:43 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 17 Oct 2007 17:35:43 -0700 Subject: Problem epi2 SNF 2007-10-12 19:49:18: No HCl Message-ID: Leak in HCl panel C&C rebuilt venturi on the "good" panel (the leaking panel will be replaced) From eenriquez at snf.stanford.edu Thu Oct 18 07:27:42 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 18 Oct 2007 07:27:42 -0700 Subject: Comment epi2 SNF 2007-10-11 07:33:42: Replaced HCl cylinder Message-ID: From eenriquez at snf.stanford.edu Thu Oct 18 07:31:35 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 18 Oct 2007 07:31:35 -0700 Subject: Comment epi2 SNF 2007-10-18 07:31:35: HCl cylinder changed Message-ID: New HCl cylinder installed on 10/17 "B" side From eenriquez at snf.stanford.edu Fri Oct 19 15:14:21 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 19 Oct 2007 15:14:21 -0700 Subject: Comment epi2 SNF 2007-10-19 15:14:20: This is a test Message-ID: From eenriquez at snf.stanford.edu Fri Oct 19 15:14:37 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 19 Oct 2007 15:14:37 -0700 Subject: Comment epi2 SNF 2007-10-19 15:14:20: This is a test Message-ID: Blog test completed From ehe at snf.stanford.edu Sat Oct 20 16:38:26 2007 From: ehe at snf.stanford.edu (ehe at snf.stanford.edu) Date: Sat, 20 Oct 2007 16:38:26 -0700 Subject: Comment epi2 SNF 2007-10-20 16:38:26: errors leading to isolation mode Message-ID: First wafer process went smoothly, but second wafer process aborted and went into isolation mode with the following errors: "Chamber A pressure setpoint deviation fault" and "Chamber A pressure valve failed to close". From ehe at snf.stanford.edu Sat Oct 20 17:29:04 2007 From: ehe at snf.stanford.edu (ehe at snf.stanford.edu) Date: Sat, 20 Oct 2007 17:29:04 -0700 Subject: Shutdown epi2 SNF 2007-10-20 17:29:04: shutdown epi2 Message-ID: Shutdown decision made after conferring with other epi2 users. The following errors (amongst others) resulted in aborted runs: Ch. A cannot backfill to 70.0 torr Ch. A pressure control valve failed to close Ch. A press. cont. valve never reached home in minus direction Ch. A reduced pressure stepper failed Ch. A failed initializing pressure subsystem.... System went to isolated mode; one wafer left behind in Ch.A. From eenriquez at snf.stanford.edu Mon Oct 22 13:21:23 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 22 Oct 2007 13:21:23 -0700 Subject: Shutdown epi2 SNF 2007-10-20 17:29:04: shutdown epi2 Message-ID: Cleaned and recalibrated the pressure control valve. User's stranded wafer is in the LL. From eenriquez at snf.stanford.edu Mon Oct 22 13:21:36 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 22 Oct 2007 13:21:36 -0700 Subject: Comment epi2 SNF 2007-10-20 16:38:26: errors leading to isolation mode Message-ID: Cleaned and recalibrated the pressure control valve. User's stranded wafer is in the LL. From eenriquez at snf.stanford.edu Mon Oct 22 13:21:56 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 22 Oct 2007 13:21:56 -0700 Subject: Comment epi2 SNF 2007-10-20 16:38:26: errors leading to isolation mode Message-ID: Cleaned and recalibrated the pressure control valve. User's stranded wafer is in the LL. From masaharu at snf.stanford.edu Tue Oct 23 07:10:28 2007 From: masaharu at snf.stanford.edu (masaharu at snf.stanford.edu) Date: Tue, 23 Oct 2007 07:10:28 -0700 Subject: Problem epi2 SNF 2007-10-23 07:10:27: Message-ID: From masaharu at snf.stanford.edu Tue Oct 23 07:14:18 2007 From: masaharu at snf.stanford.edu (masaharu at snf.stanford.edu) Date: Tue, 23 Oct 2007 07:14:18 -0700 Subject: Problem epi2 SNF 2007-10-23 07:14:17: Chamber A main scrubber fault Message-ID: Before I started, "Chamber A main scrubber fault" showed up. Because of this, could not go further. From eenriquez at snf.stanford.edu Tue Oct 23 07:58:04 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 23 Oct 2007 07:58:04 -0700 Subject: Problem epi2 SNF 2007-10-23 07:10:27: Message-ID: Scrubber failed high exhaust pressure. Reset the scrubber and burn box. This is an intermittent problem. Might be related to the recipe's total gas flow. Need to find out which recipe the last user ran. From eenriquez at snf.stanford.edu Tue Oct 23 07:58:18 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 23 Oct 2007 07:58:18 -0700 Subject: Problem epi2 SNF 2007-10-23 07:14:17: Chamber A main scrubber fault Message-ID: Scrubber failed high exhaust pressure. Reset the scrubber and burn box. This is an intermittent problem. Might be related to the recipe's total gas flow. Need to find out which recipe the last user ran. From maurice at snf.stanford.edu Wed Oct 24 09:20:20 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 24 Oct 2007 09:20:20 -0700 Subject: Shutdown epi2 SNF 2007-10-24 09:20:19: HCL issue in bunker Message-ID: From eenriquez at snf.stanford.edu Wed Oct 24 18:33:56 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 24 Oct 2007 18:33:56 -0700 Subject: Comment epi2 SNF 2007-10-24 18:33:55: HCl gas panel is non functional Message-ID: HCl "B" panel is non-functional. An existing corrode valve finally failled and destroyed the new venturi vacuum generator we had just replaced. Fortunately, we had already planned to rebuild and replace the back-up (Panel "A") with a more up to date model. HCl should be availabel early next week. From maurice at snf.stanford.edu Thu Oct 25 14:38:14 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 25 Oct 2007 14:38:14 -0700 Subject: Problem epi2 SNF 2007-10-25 14:38:14: hard drive full Message-ID: The hard disk on EPI2 is full. If you have recipes on the hard drive that you don't need, please delete them. If you have more recipes on the drive than you have fingers and toes, please removes some. The recipes are easy to create if you have the parameters written down. Our maint guys are working on the floppy and hope to have it up soon. -m From maurice at snf.stanford.edu Fri Oct 26 10:58:19 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 26 Oct 2007 10:58:19 -0700 Subject: Shutdown epi2 SNF 2007-10-24 09:20:19: HCL issue in bunker Message-ID: System can be used for H2 anneals only!! No Depositions. From maurice at snf.stanford.edu Fri Oct 26 10:59:41 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 26 Oct 2007 10:59:41 -0700 Subject: Problem epi2 SNF 2007-10-26 10:59:40: H2 anneals only!! No Depositions. Message-ID: No HCl to system. Cannot etch chamber. System can be used for H2 anneals only!! No Depositions.