October 2007 Archives by subject

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Starting: Tue Oct 2 22:39:21 PDT 2007
Ending: Fri Oct 26 10:59:41 PDT 2007
Messages: 65

Comment epi2 SNF 2007-09-07 08:15:43: Switched HCl cylinder maurice at snf.stanford.edu
Comment epi2 SNF 2007-09-12 09:16:49: Dome looks clear maurice at snf.stanford.edu
Comment epi2 SNF 2007-09-28 14:29:42: Installed new Germane cylinder maurice at snf.stanford.edu
Comment epi2 SNF 2007-10-07 20:22:05: main h2 supply pressure high? ehe at snf.stanford.edu
Comment epi2 SNF 2007-10-07 20:22:05: main h2 supply pressure high? maurice at snf.stanford.edu
Comment epi2 SNF 2007-10-08 10:03:40: error msg? ehe at snf.stanford.edu
Comment epi2 SNF 2007-10-08 10:03:40: error msg? maurice at snf.stanford.edu
Comment epi2 SNF 2007-10-10 14:40:07: Lamp failure maurice at snf.stanford.edu
Comment epi2 SNF 2007-10-10 14:40:07: Lamp failure maurice at snf.stanford.edu
Comment epi2 SNF 2007-10-11 07:33:42: Replaced HCl cylinder eenriquez at snf.stanford.edu
Comment epi2 SNF 2007-10-11 07:33:42: Replaced HCl cylinder eenriquez at snf.stanford.edu
Comment epi2 SNF 2007-10-11 14:18:09: checking upper bank maurice at snf.stanford.edu
Comment epi2 SNF 2007-10-11 14:18:09: checking upper bank maurice at snf.stanford.edu
Comment epi2 SNF 2007-10-12 15:48:54: dome clear maurice at snf.stanford.edu
Comment epi2 SNF 2007-10-12 15:49:48: Burnbox:sparkplug changed maurice at snf.stanford.edu
Comment epi2 SNF 2007-10-18 07:31:35: HCl cylinder changed eenriquez at snf.stanford.edu
Comment epi2 SNF 2007-10-19 15:14:20: This is a test eenriquez at snf.stanford.edu
Comment epi2 SNF 2007-10-19 15:14:20: This is a test eenriquez at snf.stanford.edu
Comment epi2 SNF 2007-10-20 16:38:26: errors leading to isolation mode ehe at snf.stanford.edu
Comment epi2 SNF 2007-10-20 16:38:26: errors leading to isolation mode eenriquez at snf.stanford.edu
Comment epi2 SNF 2007-10-20 16:38:26: errors leading to isolation mode eenriquez at snf.stanford.edu
Comment epi2 SNF 2007-10-24 18:33:55: HCl gas panel is non functional eenriquez at snf.stanford.edu
Problem epi2 SNF 2007-09-10 16:31:46: Upper temp 100c higher than setpoint maurice at snf.stanford.edu
Problem epi2 SNF 2007-09-13 21:47:38: Dopants problem maurice at snf.stanford.edu
Problem epi2 SNF 2007-09-22 02:33:42: dopant problem maurice at snf.stanford.edu
Problem epi2 SNF 2007-10-02 22:39:21: Low Temperature deviation fault donghun.choi at snf.stanford.edu
Problem epi2 SNF 2007-10-02 22:39:21: Low Temperature deviation fault maurice at snf.stanford.edu
Problem epi2 SNF 2007-10-03 20:02:30: No DCS flow rshyam at snf.stanford.edu
Problem epi2 SNF 2007-10-03 20:02:30: No DCS flow eenriquez at snf.stanford.edu
Problem epi2 SNF 2007-10-09 03:42:37: chamber is isolated yuhykr at snf.stanford.edu
Problem epi2 SNF 2007-10-09 03:42:37: chamber is isolated eenriquez at snf.stanford.edu
Problem epi2 SNF 2007-10-09 20:21:40: dopant problems mmessana at snf.stanford.edu
Problem epi2 SNF 2007-10-09 20:21:40: dopant problems maurice at snf.stanford.edu
Problem epi2 SNF 2007-10-10 14:50:11: CHA bulb failure gunjim at snf.stanford.edu
Problem epi2 SNF 2007-10-10 14:50:11: CHA bulb failure maurice at snf.stanford.edu
Problem epi2 SNF 2007-10-12 19:35:55: Load Lock A Stepper Motor Error mmessana at snf.stanford.edu
Problem epi2 SNF 2007-10-12 19:35:55: Load Lock A Stepper Motor Error eenriquez at snf.stanford.edu
Problem epi2 SNF 2007-10-12 19:49:18: No HCl emyers at snf.stanford.edu
Problem epi2 SNF 2007-10-12 19:49:18: No HCl maurice at snf.stanford.edu
Problem epi2 SNF 2007-10-12 21:49:09: Load Lock A & B koba at snf.stanford.edu
Problem epi2 SNF 2007-10-12 21:49:09: Load Lock A & B eenriquez at snf.stanford.edu
Problem epi2 SNF 2007-10-23 07:10:27: masaharu at snf.stanford.edu
Problem epi2 SNF 2007-10-23 07:10:27: eenriquez at snf.stanford.edu
Problem epi2 SNF 2007-10-23 07:14:17: Chamber A main scrubber fault masaharu at snf.stanford.edu
Problem epi2 SNF 2007-10-23 07:14:17: Chamber A main scrubber fault eenriquez at snf.stanford.edu
Problem epi2 SNF 2007-10-25 14:38:14: hard drive full maurice at snf.stanford.edu
Problem epi2 SNF 2007-10-26 10:59:40: H2 anneals only!! No Depositions. maurice at snf.stanford.edu
Shutdown epi2 SNF 2007-10-03 09:08:45: Needs HCl bottle change mtang at snf.stanford.edu
Shutdown epi2 SNF 2007-10-03 09:08:45: Needs HCl bottle change eenriquez at snf.stanford.edu
Shutdown epi2 SNF 2007-10-09 03:58:33: Chamber A lift can't reach process position yuhykr at snf.stanford.edu
Shutdown epi2 SNF 2007-10-09 03:58:33: Chamber A lift can't reach process position eenriquez at snf.stanford.edu
Shutdown epi2 SNF 2007-10-09 15:15:07: bulb failure maurice at snf.stanford.edu
Shutdown epi2 SNF 2007-10-09 15:15:07: bulb failure maurice at snf.stanford.edu
Shutdown epi2 SNF 2007-10-10 16:09:57: Lamp failure gunjim at snf.stanford.edu
Shutdown epi2 SNF 2007-10-10 16:09:57: Lamp failure maurice at snf.stanford.edu
Shutdown epi2 SNF 2007-10-13 00:03:47: impossible to load wafer... yuhykr at snf.stanford.edu
Shutdown epi2 SNF 2007-10-13 00:03:47: impossible to load wafer... eenriquez at snf.stanford.edu
Shutdown epi2 SNF 2007-10-15 08:27:34: No HCl eenriquez at snf.stanford.edu
Shutdown epi2 SNF 2007-10-15 08:27:34: No HCl maurice at snf.stanford.edu
Shutdown epi2 SNF 2007-10-15 14:51:45: Burn box faults for low H2 pressur maurice at snf.stanford.edu
Shutdown epi2 SNF 2007-10-15 14:51:45: Burn box faults for low H2 pressur maurice at snf.stanford.edu
Shutdown epi2 SNF 2007-10-20 17:29:04: shutdown epi2 ehe at snf.stanford.edu
Shutdown epi2 SNF 2007-10-20 17:29:04: shutdown epi2 eenriquez at snf.stanford.edu
Shutdown epi2 SNF 2007-10-24 09:20:19: HCL issue in bunker maurice at snf.stanford.edu
Shutdown epi2 SNF 2007-10-24 09:20:19: HCL issue in bunker maurice at snf.stanford.edu

Last message date: Fri Oct 26 10:59:41 PDT 2007
Archived on: Sun Dec 23 08:52:46 PST 2012

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