From rshyam at snf.stanford.edu Sat Sep 1 19:54:44 2007 From: rshyam at snf.stanford.edu (rshyam at snf.stanford.edu) Date: Sat, 1 Sep 2007 19:54:44 -0700 Subject: Problem epi2 SNF 2007-09-01 19:54:43: Temp deviation fault in BigEtch Message-ID: Tried running BigEtch twice and both times it gave a temperature setpoint deviation fault. Fault did not occur in my regular recipes. From rshyam at snf.stanford.edu Sat Sep 1 22:18:00 2007 From: rshyam at snf.stanford.edu (rshyam at snf.stanford.edu) Date: Sat, 1 Sep 2007 22:18:00 -0700 Subject: Problem epi2 SNF 2007-09-01 22:17:59: DCS flow deviation fault Message-ID: From maurice at snf.stanford.edu Tue Sep 4 13:34:22 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 4 Sep 2007 13:34:22 -0700 Subject: Problem epi2 SNF 2007-09-01 22:17:59: DCS flow deviation fault Message-ID: Flowed DCS. Looks ok. The weekend was pretty warm. It may have cause some condensation in the line. From maurice at snf.stanford.edu Tue Sep 4 13:35:02 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 4 Sep 2007 13:35:02 -0700 Subject: Problem epi2 SNF 2007-09-01 19:54:43: Temp deviation fault in BigEtch Message-ID: Ran Big Etch three times. Looks ok. -m From eenriquez at snf.stanford.edu Fri Sep 7 08:15:43 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 7 Sep 2007 08:15:43 -0700 Subject: Comment epi2 SNF 2007-09-07 08:15:43: Switched HCl cylinder Message-ID: From kennyhsu at snf.stanford.edu Sat Sep 8 12:13:14 2007 From: kennyhsu at snf.stanford.edu (kennyhsu at snf.stanford.edu) Date: Sat, 8 Sep 2007 12:13:14 -0700 Subject: Problem epi2 SNF 2007-09-08 12:13:14: No HCL Gas Flow Message-ID: There is no HCL Gas Flow and therefore the machine gives me an error whenever I run a recipe with HCL. From rshyam at snf.stanford.edu Sun Sep 9 00:12:51 2007 From: rshyam at snf.stanford.edu (rshyam at snf.stanford.edu) Date: Sun, 9 Sep 2007 00:12:51 -0700 Subject: Problem epi2 SNF 2007-09-09 00:12:51: HCl flow Message-ID: Same problem as previous user. The gas panel near the old epi shows 0 flow for HCL From mdickey at snf.stanford.edu Mon Sep 10 06:40:27 2007 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 10 Sep 2007 06:40:27 -0700 Subject: Problem epi2 SNF 2007-09-09 00:12:51: HCl flow Message-ID: HCL back on line From mdickey at snf.stanford.edu Mon Sep 10 06:40:41 2007 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 10 Sep 2007 06:40:41 -0700 Subject: Problem epi2 SNF 2007-09-08 12:13:14: No HCL Gas Flow Message-ID: HCL back on line From maurice at snf.stanford.edu Mon Sep 10 16:31:46 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 10 Sep 2007 16:31:46 -0700 Subject: Problem epi2 SNF 2007-09-10 16:31:46: Upper temp 100c higher than setpoint Message-ID: During bake step of GE400HA program, upper temp was 1200...set point was 1100. This is an existing program that has not done this before. From cbaxter at snf.stanford.edu Wed Sep 12 09:14:03 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 12 Sep 2007 09:14:03 -0700 Subject: Comment epi2 SNF 2007-09-12 09:14:02: Low water flow error Message-ID: Error happen during process, was able to cleared error, will monitor. From eenriquez at snf.stanford.edu Wed Sep 12 09:16:50 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 12 Sep 2007 09:16:50 -0700 Subject: Comment epi2 SNF 2007-09-12 09:16:49: Dome looks clear Message-ID: Checked dome yesterday and it looks very clear From maurice at snf.stanford.edu Thu Sep 13 13:08:28 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 13 Sep 2007 13:08:28 -0700 Subject: Problem epi2 SNF 2007-09-13 13:08:27: Message-ID: From renshen at snf.stanford.edu Thu Sep 13 21:47:38 2007 From: renshen at snf.stanford.edu (renshen at snf.stanford.edu) Date: Thu, 13 Sep 2007 21:47:38 -0700 Subject: Problem epi2 SNF 2007-09-13 21:47:38: Dopants problem Message-ID: For DOP2 and D-DOP2, we cannot get any flow at all, no matter what setpoint that I set. This morning, Maurice checked and seems that DOP2 works when flowing it to chamber. This is not really true. This is just an artifact. After flowing around 1min or so, the flow decreases and eventally goes to N/F. Also, D-DOP2 doesn't give any flow at all. Please check what causes this problem in our machine. This is very crucial since right now, we essentially cannot do P doping at all in this machine. From renshen at snf.stanford.edu Thu Sep 13 21:48:55 2007 From: renshen at snf.stanford.edu (renshen at snf.stanford.edu) Date: Thu, 13 Sep 2007 21:48:55 -0700 Subject: Problem epi2 SNF 2007-09-13 21:48:55: Water Flow problem Message-ID: The machine gives many low water flow problem today. This problem keeps on happening recently and we believe it is not only an artifact... From rissman at snf.stanford.edu Fri Sep 14 09:06:59 2007 From: rissman at snf.stanford.edu (rissman at snf.stanford.edu) Date: Fri, 14 Sep 2007 09:06:59 -0700 Subject: Problem epi2 SNF 2007-09-13 13:08:27: Message-ID: From rshyam at snf.stanford.edu Sun Sep 16 15:16:36 2007 From: rshyam at snf.stanford.edu (rshyam at snf.stanford.edu) Date: Sun, 16 Sep 2007 15:16:36 -0700 Subject: Problem epi2 SNF 2007-09-16 15:16:35: Wafer too far off center for center finder to correct Message-ID: I got the error "Wafer too far off center for center finder to correct". This happened when my wafer was being transferred from Chamber A to Chamber F. My first five wafers ran successfully without problems, this error happened to my sixth wafer. After a couple of attempts at moving where it gave the same error, it then successfully moved the wafer to Load lock B and I was able to retrieve it. From ehe at snf.stanford.edu Sun Sep 16 20:25:25 2007 From: ehe at snf.stanford.edu (ehe at snf.stanford.edu) Date: Sun, 16 Sep 2007 20:25:25 -0700 Subject: Comment epi2 SNF 2007-09-16 20:25:24: low water flow msg persisting Message-ID: Normally we get the low water flow error message when running the epi2 through cold/hot idle during startup, but I got it this warning over 20 times when trying to get through cold and hot idle. Just when I was about to start considering this as an actual problem, the message stopped coming up and I was able to run the Ge etch coat. Recently it seems like this warning has gotten more persistent during startup, is this anyone elses' experience? From rshyam at snf.stanford.edu Sun Sep 16 23:25:53 2007 From: rshyam at snf.stanford.edu (rshyam at snf.stanford.edu) Date: Sun, 16 Sep 2007 23:25:53 -0700 Subject: Comment epi2 SNF 2007-09-16 23:25:53: low water flow Message-ID: I agree with users renshen and ehe. The low water flow has become more persistent and takes a few attempts before it goes into hot idle for sure. I think it happens most often when the reactor has been in inert idle for a long time and i think it helps if we leave it in cold idle for a longer time than usual before going to hot idle during startup. From maurice at snf.stanford.edu Mon Sep 17 15:12:57 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 17 Sep 2007 15:12:57 -0700 Subject: Problem epi2 SNF 2007-09-13 21:48:55: Water Flow problem Message-ID: Elmer increased cooling water flow to the machine From maurice at snf.stanford.edu Mon Sep 17 15:13:26 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 17 Sep 2007 15:13:26 -0700 Subject: Comment epi2 SNF 2007-09-16 23:25:53: low water flow Message-ID: Elmer increased cooling water flow to the machine From maurice at snf.stanford.edu Mon Sep 17 15:13:37 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 17 Sep 2007 15:13:37 -0700 Subject: Comment epi2 SNF 2007-09-16 20:25:24: low water flow msg persisting Message-ID: Elmer increased cooling water flow to the machine From maurice at snf.stanford.edu Mon Sep 17 15:13:50 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 17 Sep 2007 15:13:50 -0700 Subject: Comment epi2 SNF 2007-09-12 09:14:02: Low water flow error Message-ID: Elmer increased cooling water flow to the machine From maurice at snf.stanford.edu Tue Sep 18 11:37:49 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 18 Sep 2007 11:37:49 -0700 Subject: Problem epi2 SNF 2007-09-16 15:16:35: Wafer too far off center for center finder to correct Message-ID: User recovered wafer From maurice at snf.stanford.edu Wed Sep 19 14:40:41 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 19 Sep 2007 14:40:41 -0700 Subject: Shutdown epi2 SNF 2007-09-19 14:40:41: wafer lost in system Message-ID: user stopped sequencers while wafer was loading into chamber. Now machines says there is no wafer on the blade. From cbaxter at snf.stanford.edu Wed Sep 19 15:44:52 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 19 Sep 2007 15:44:52 -0700 Subject: Shutdown epi2 SNF 2007-09-19 14:40:41: wafer lost in system Message-ID: Reecovered wafer on chamber A and returned back to load lock A cassette. From rshyam at snf.stanford.edu Wed Sep 19 18:19:47 2007 From: rshyam at snf.stanford.edu (rshyam at snf.stanford.edu) Date: Wed, 19 Sep 2007 18:19:47 -0700 Subject: Problem epi2 SNF 2007-09-19 18:19:46: MFC Message-ID: When we look at the gas flows in "Monitor gas panels", most gases are showing reasonable flows even when the setpoint is zero. For example, D-DOP1 shows a flow of 4.6 sccm when the MFC is supposed to be completely closed. This is probably a zero-calibration issue. Please look into this. From kennyhsu at snf.stanford.edu Sat Sep 22 02:33:43 2007 From: kennyhsu at snf.stanford.edu (kennyhsu at snf.stanford.edu) Date: Sat, 22 Sep 2007 02:33:43 -0700 Subject: Problem epi2 SNF 2007-09-22 02:33:42: dopant problem Message-ID: the dopant problem heavily exists still, d-dop1 is stuck at 5sccm and dop1 doesn't work. From rshyam at snf.stanford.edu Mon Sep 24 05:38:17 2007 From: rshyam at snf.stanford.edu (rshyam at snf.stanford.edu) Date: Mon, 24 Sep 2007 05:38:17 -0700 Subject: Shutdown epi2 SNF 2007-09-24 05:38:17: Message-ID: Gave these errors when it finished the cleaning recipe and was about to start process recipe. "Chamber A over pressure detected by hardware interlock" and chamber went offline. After bringing back online, it gave the error "Transfer robot top/ext stepper lost position" From eenriquez at snf.stanford.edu Mon Sep 24 08:32:49 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 24 Sep 2007 08:32:49 -0700 Subject: Shutdown epi2 SNF 2007-09-24 05:38:17: Message-ID: Rehomed the transfer arm robot and unloaded the chamber. From gyama at snf.stanford.edu Mon Sep 24 10:44:50 2007 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Mon, 24 Sep 2007 10:44:50 -0700 Subject: Problem epi2 SNF 2007-09-24 10:44:49: prevent further action because of fault Message-ID: From eenriquez at snf.stanford.edu Mon Sep 24 14:21:26 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 24 Sep 2007 14:21:26 -0700 Subject: Problem epi2 SNF 2007-09-24 10:44:49: prevent further action because of fault Message-ID: Low water flow error. Cleared error and placed system in Hot idle. From rshyam at snf.stanford.edu Tue Sep 25 06:23:55 2007 From: rshyam at snf.stanford.edu (rshyam at snf.stanford.edu) Date: Tue, 25 Sep 2007 06:23:55 -0700 Subject: Problem epi2 SNF 2007-09-25 06:23:54: Chamber overpressure error Message-ID: This error occurs during Step 9 of the 'Ge etch coat ' recipe. Tried thrice with same result. From eenriquez at snf.stanford.edu Tue Sep 25 07:45:01 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 25 Sep 2007 07:45:01 -0700 Subject: Shutdown epi2 SNF 2007-09-25 07:45:01: ch. over pressure Message-ID: Will investigate pressure problem. Will also replace HCL cylinders. From eenriquez at snf.stanford.edu Tue Sep 25 14:15:50 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 25 Sep 2007 14:15:50 -0700 Subject: Shutdown epi2 SNF 2007-09-25 07:45:01: ch. over pressure Message-ID: Completed HCl cylinder change. Maurice is investigating the over pressure problem. Possible bad vacuum pump ?? From maurice at snf.stanford.edu Tue Sep 25 14:30:55 2007 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 25 Sep 2007 14:30:55 -0700 Subject: Problem epi2 SNF 2007-09-25 06:23:54: Chamber overpressure error Message-ID: I was unable to repeat problem. I ran Ge etch recipe twice. I watched every step. Pressure never went above 605 torr. We will continue to observe it. From rshyam at snf.stanford.edu Fri Sep 28 13:54:03 2007 From: rshyam at snf.stanford.edu (rshyam at snf.stanford.edu) Date: Fri, 28 Sep 2007 13:54:03 -0700 Subject: Problem epi2 SNF 2007-09-28 13:54:02: D-Dop1 MFC recalibration Message-ID: D-Dop1 is a 100 sccm line calibrated for 500 sccm, so the control is bad. Please recalibrate it at 100 sccm as soon as possible. Thanks. From violetqu at snf.stanford.edu Fri Sep 28 14:00:26 2007 From: violetqu at snf.stanford.edu (violetqu at snf.stanford.edu) Date: Fri, 28 Sep 2007 14:00:26 -0700 Subject: Problem epi2 SNF 2007-09-28 14:00:25: blade not at zero or wafer slide Message-ID: cannot close chamber A slit valve. wafer inside! From eenriquez at snf.stanford.edu Fri Sep 28 14:29:19 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 28 Sep 2007 14:29:19 -0700 Subject: Problem epi2 SNF 2007-09-28 14:00:25: blade not at zero or wafer slide Message-ID: Rehome robot and move wafer out. From eenriquez at snf.stanford.edu Fri Sep 28 14:29:42 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 28 Sep 2007 14:29:42 -0700 Subject: Comment epi2 SNF 2007-09-28 14:29:42: Installed new Germane cylinder Message-ID: