Problem epi2 SNF 2007-09-01 19:54:43: Temp deviation fault in BigEtch

rshyam at snf.stanford.edu rshyam at snf.stanford.edu
Sat Sep 1 19:54:44 PDT 2007


Tried running BigEtch twice and both times it gave a temperature setpoint deviation fault. Fault did not occur in my regular recipes.




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