Comment epi2 SNF 2007-09-16 23:25:53: low water flow
maurice at snf.stanford.edu
maurice at snf.stanford.edu
Mon Sep 17 15:13:26 PDT 2007
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Comment epi2 SNF 2007-09-16 23:25:53: low water flow
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Elmer increased cooling water flow to the machine
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Comment epi2 SNF 2007-09-16 23:25:53: low water flow
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Shutdown epi2 SNF 2007-09-19 14:40:41: wafer lost in system
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