Problem epi2 SNF 2007-09-16 15:16:35: Wafer too far off center for center finder to correct
maurice at snf.stanford.edu
maurice at snf.stanford.edu
Tue Sep 18 11:37:49 PDT 2007
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Problem epi2 SNF 2007-09-16 15:16:35: Wafer too far off center for center finder to correct
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Comment epi2 SNF 2007-09-16 20:25:24: low water flow msg persisting
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User recovered wafer
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Problem epi2 SNF 2007-09-16 15:16:35: Wafer too far off center for center finder to correct
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Comment epi2 SNF 2007-09-16 20:25:24: low water flow msg persisting
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