Problem epi2 SNF 2007-09-19 18:19:46: MFC

rshyam at snf.stanford.edu rshyam at snf.stanford.edu
Wed Sep 19 18:19:47 PDT 2007


When we look at the gas flows in "Monitor gas panels", most gases are showing reasonable flows even when the setpoint is zero. For example, D-DOP1 shows a flow of 4.6 sccm when the MFC is supposed to be completely closed. This is probably a zero-calibration issue. Please look into this.




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