Shutdown epi2 SNF 2007-09-24 05:38:17:

rshyam at snf.stanford.edu rshyam at snf.stanford.edu
Mon Sep 24 05:38:17 PDT 2007


Gave these errors when it finished the cleaning recipe and was about to start process recipe.
"Chamber A over pressure detected by hardware interlock" and chamber went offline. After bringing back online, it gave the error "Transfer robot top/ext stepper lost position"




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