Problem epi2 SNF 2007-09-25 06:23:54: Chamber overpressure error

rshyam at snf.stanford.edu rshyam at snf.stanford.edu
Tue Sep 25 06:23:55 PDT 2007

Previous message: Problem epi2 SNF 2007-09-24 10:44:49: prevent further action because of fault
Next message: Problem epi2 SNF 2007-09-25 06:23:54: Chamber overpressure error
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

This error occurs during Step 9 of the 'Ge etch coat ' recipe. Tried thrice with same result.

Previous message: Problem epi2 SNF 2007-09-24 10:44:49: prevent further action because of fault
Next message: Problem epi2 SNF 2007-09-25 06:23:54: Chamber overpressure error
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the epi2-pcs mailing list