Problem epi2 SNF 2007-09-25 06:23:54: Chamber overpressure error

rshyam at snf.stanford.edu rshyam at snf.stanford.edu
Tue Sep 25 06:23:55 PDT 2007


This error occurs during Step 9 of the 'Ge etch coat ' recipe. Tried thrice with same result.




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