Problem epi2 SNF 2007-09-25 06:23:54: Chamber overpressure error

maurice at snf.stanford.edu maurice at snf.stanford.edu
Tue Sep 25 14:30:55 PDT 2007


I was unable to repeat problem.  I ran Ge etch recipe twice.  I watched every step.  Pressure never went above 605 torr.
We will continue to observe it.




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