Problem epi2 SNF 2007-09-28 13:54:02: D-Dop1 MFC recalibration

rshyam at snf.stanford.edu rshyam at snf.stanford.edu
Fri Sep 28 13:54:03 PDT 2007

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D-Dop1 is a 100 sccm line calibrated for 500 sccm, so the control is bad. Please recalibrate it at 100 sccm as soon as possible. Thanks.

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