Problem epi2 SNF 2007-09-28 14:00:25: blade not at zero or wafer slide
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Fri Sep 28 14:29:19 PDT 2007
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Problem epi2 SNF 2007-09-28 14:00:25: blade not at zero or wafer slide
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Comment epi2 SNF 2007-09-28 14:29:42: Installed new Germane cylinder
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Rehome robot and move wafer out.
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Problem epi2 SNF 2007-09-28 14:00:25: blade not at zero or wafer slide
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Comment epi2 SNF 2007-09-28 14:29:42: Installed new Germane cylinder
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