September 2007 Archives by subject

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Starting: Sat Sep 1 19:54:44 PDT 2007
Ending: Fri Sep 28 14:29:42 PDT 2007
Messages: 40

• Comment epi2 SNF 2007-09-07 08:15:43: Switched HCl cylinder   eenriquez at snf.stanford.edu
• Comment epi2 SNF 2007-09-12 09:14:02: Low water flow error   cbaxter at snf.stanford.edu
• Comment epi2 SNF 2007-09-12 09:14:02: Low water flow error   maurice at snf.stanford.edu
• Comment epi2 SNF 2007-09-12 09:16:49: Dome looks clear   eenriquez at snf.stanford.edu
• Comment epi2 SNF 2007-09-16 20:25:24: low water flow msg persisting   ehe at snf.stanford.edu
• Comment epi2 SNF 2007-09-16 20:25:24: low water flow msg persisting   maurice at snf.stanford.edu
• Comment epi2 SNF 2007-09-16 23:25:53: low water flow   rshyam at snf.stanford.edu
• Comment epi2 SNF 2007-09-16 23:25:53: low water flow   maurice at snf.stanford.edu
• Comment epi2 SNF 2007-09-28 14:29:42: Installed new Germane cylinder   eenriquez at snf.stanford.edu
• Problem epi2 SNF 2007-09-01 19:54:43: Temp deviation fault in BigEtch   rshyam at snf.stanford.edu
• Problem epi2 SNF 2007-09-01 19:54:43: Temp deviation fault in BigEtch   maurice at snf.stanford.edu
• Problem epi2 SNF 2007-09-01 22:17:59: DCS flow deviation fault   rshyam at snf.stanford.edu
• Problem epi2 SNF 2007-09-01 22:17:59: DCS flow deviation fault   maurice at snf.stanford.edu
• Problem epi2 SNF 2007-09-08 12:13:14: No HCL Gas Flow   kennyhsu at snf.stanford.edu
• Problem epi2 SNF 2007-09-08 12:13:14: No HCL Gas Flow   mdickey at snf.stanford.edu
• Problem epi2 SNF 2007-09-09 00:12:51: HCl flow   rshyam at snf.stanford.edu
• Problem epi2 SNF 2007-09-09 00:12:51: HCl flow   mdickey at snf.stanford.edu
• Problem epi2 SNF 2007-09-10 16:31:46: Upper temp 100c higher than setpoint   maurice at snf.stanford.edu
• Problem epi2 SNF 2007-09-13 13:08:27:   maurice at snf.stanford.edu
• Problem epi2 SNF 2007-09-13 13:08:27:   rissman at snf.stanford.edu
• Problem epi2 SNF 2007-09-13 21:47:38: Dopants problem   renshen at snf.stanford.edu
• Problem epi2 SNF 2007-09-13 21:48:55: Water Flow problem   renshen at snf.stanford.edu
• Problem epi2 SNF 2007-09-13 21:48:55: Water Flow problem   maurice at snf.stanford.edu
• Problem epi2 SNF 2007-09-16 15:16:35: Wafer too far off center for center finder to correct   rshyam at snf.stanford.edu
• Problem epi2 SNF 2007-09-16 15:16:35: Wafer too far off center for center finder to correct   maurice at snf.stanford.edu
• Problem epi2 SNF 2007-09-19 18:19:46: MFC   rshyam at snf.stanford.edu
• Problem epi2 SNF 2007-09-22 02:33:42: dopant problem   kennyhsu at snf.stanford.edu
• Problem epi2 SNF 2007-09-24 10:44:49: prevent further action because of fault   gyama at snf.stanford.edu
• Problem epi2 SNF 2007-09-24 10:44:49: prevent further action because of fault   eenriquez at snf.stanford.edu
• Problem epi2 SNF 2007-09-25 06:23:54: Chamber overpressure error   rshyam at snf.stanford.edu
• Problem epi2 SNF 2007-09-25 06:23:54: Chamber overpressure error   maurice at snf.stanford.edu
• Problem epi2 SNF 2007-09-28 13:54:02: D-Dop1 MFC recalibration   rshyam at snf.stanford.edu
• Problem epi2 SNF 2007-09-28 14:00:25: blade not at zero or wafer slide   violetqu at snf.stanford.edu
• Problem epi2 SNF 2007-09-28 14:00:25: blade not at zero or wafer slide   eenriquez at snf.stanford.edu
• Shutdown epi2 SNF 2007-09-19 14:40:41: wafer lost in system   maurice at snf.stanford.edu
• Shutdown epi2 SNF 2007-09-19 14:40:41: wafer lost in system   cbaxter at snf.stanford.edu
• Shutdown epi2 SNF 2007-09-24 05:38:17:   rshyam at snf.stanford.edu
• Shutdown epi2 SNF 2007-09-24 05:38:17:   eenriquez at snf.stanford.edu
• Shutdown epi2 SNF 2007-09-25 07:45:01: ch. over pressure   eenriquez at snf.stanford.edu
• Shutdown epi2 SNF 2007-09-25 07:45:01: ch. over pressure   eenriquez at snf.stanford.edu

Last message date: Fri Sep 28 14:29:42 PDT 2007
Archived on: Sun Dec 23 08:52:46 PST 2012

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