Comment epi2 SNF 2008-03-25 06:10:46: SiH4 10sccm is not controlable

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Wed Apr 2 18:57:44 PDT 2008


SiH4 MFC is too large (500 sccm maximum flow) to repeatably control at 10 sccm.  Need to replace the MFC if we want to flow at such low rates.




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