Shutdown epi2 SNF 2008-08-05 13:47:00: wafer does not transfer into ch A

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Wed Aug 6 17:21:14 PDT 2008


Replaced various broken quartz components:  susceptor support, lift pins, susceptor pins.
Found that wafer loaded on the susceptor was not completely in the pocket.  Adjusted wafer handoff position.




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