Problem epi2 SNF 2008-08-05 12:40:37: wafer does not transfer into ch A

eenriquez at eenriquez at
Wed Aug 6 17:21:23 PDT 2008

Replaced various broken quartz components:  susceptor support, lift pins, susceptor pins.
Found that wafer loaded on the susceptor was not completely in the pocket.  Adjusted wafer handoff position.

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