Problem epi2 SNF 2008-08-09 09:17:10: Chamber A Overpressure

[jrjain at snf.stanford.edu]

During GE ETCH COAT after done processing wafer, got below warnings/errors:
Chamber A pressure setpoint deviation warning
Chamber A over pressure warning - 803.623 torr
Chamber A over pressure detected by hardware interlock
Chamber A process has aborted
Chamber A heater contactor off
Chamber A now goes to offline state