Problem epi2 SNF 2008-08-09 09:17:10: Chamber A Overpressure

jrjain at snf.stanford.edu jrjain at snf.stanford.edu
Sat Aug 9 09:17:10 PDT 2008


During GE ETCH COAT after done processing wafer, got below warnings/errors:
Chamber A pressure setpoint deviation warning
Chamber A over pressure warning - 803.623 torr
Chamber A over pressure detected by hardware interlock
Chamber A process has aborted
Chamber A heater contactor off
Chamber A now goes to offline state




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