Problem epi2 SNF 2008-08-09 09:17:10: Chamber A Overpressure

jrjain at jrjain at
Sat Aug 9 09:17:10 PDT 2008

During GE ETCH COAT after done processing wafer, got below warnings/errors:
Chamber A pressure setpoint deviation warning
Chamber A over pressure warning - 803.623 torr
Chamber A over pressure detected by hardware interlock
Chamber A process has aborted
Chamber A heater contactor off
Chamber A now goes to offline state

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