Problem epi2 SNF 2008-08-10 13:51:41: LL B door
skoh at snf.stanford.edu
skoh at snf.stanford.edu
Sun Aug 10 13:51:42 PDT 2008
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Problem epi2 SNF 2008-08-09 09:17:10: Chamber A Overpressure
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Problem epi2 SNF 2008-08-10 23:17:47: Wafer handling
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LLB doesn't close when Wafer->Close LL B door is selected.
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Problem epi2 SNF 2008-08-09 09:17:10: Chamber A Overpressure
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Problem epi2 SNF 2008-08-10 23:17:47: Wafer handling
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