Problem epi2 SNF 2008-08-10 23:17:47: Wafer handling

masato at snf.stanford.edu masato at snf.stanford.edu
Sun Aug 10 23:17:47 PDT 2008


"Load/Unload LLB" and "Close LLB" does not work. So, I needed the following procedures.
1.  Close LLB door, using Monitor handler.
2.  Create wafers in LLB.
3.  Backfill in LLB.
4.  Transfer wafer into Ch. A.
5.  Run recipe. 




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