Shutdown epi2 SNF 2008-08-17 14:36:17: wafer stuck in transfer chamber

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon Aug 18 15:33:32 PDT 2008


Recovered the user's wafer.  Had to vent the transfer chamber to remove the water.  Found the twist lock power connector to the transfer arm motor had been partially disconnected.




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