Comment epi2 SNF 2008-08-17 13:09:27: Wafer stucked inside

eenriquez at eenriquez at
Mon Aug 18 15:33:54 PDT 2008

Recovered the user's wafer.  Had to vent the transfer chamber to remove the water.  Found the twist lock power connector to the transfer arm motor had been partially disconnected.

More information about the epi2-pcs mailing list