Problem epi2 SNF 2008-08-19 03:25:27: Chlorine Gas Flow
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Fri Aug 22 10:44:39 PDT 2008
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Problem epi2 SNF 2008-08-19 03:25:27: Chlorine Gas Flow
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Shutdown epi2 SNF 2008-08-22 00:27:07: Chamber A rotation stepper failed homing
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Cl2 and HBr shutdown has been cleared
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Problem epi2 SNF 2008-08-19 03:25:27: Chlorine Gas Flow
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Shutdown epi2 SNF 2008-08-22 00:27:07: Chamber A rotation stepper failed homing
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