Shutdown epi2 SNF 2008-08-27 23:28:30: Wafer transfer error

slcheng at snf.stanford.edu slcheng at snf.stanford.edu
Wed Aug 27 23:28:31 PDT 2008


This happened when wafer is transfered from LLA to the transfer chamber. The fault message showed that the wafer is not on the blade and a wafer slide is detected. Therefore, the slit between transfer chamber and LLA can't be close.   




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