Problem epi2 SNF 2008-08-29 15:30:42: weird dep. on wafers

ofidaner at snf.stanford.edu ofidaner at snf.stanford.edu
Fri Aug 29 15:30:43 PDT 2008


Last three users including myself have experienced a whitish deposition everywhere on the wafers.  This has nothing to do with particles we've been experiencing recently.  Please inspect/clean the chamber.




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