Comment epi2 SNF 2008-08-29 15:58:45: Dome clear/small chunks on susceptor

maurice at snf.stanford.edu maurice at snf.stanford.edu
Fri Aug 29 15:58:45 PDT 2008


Users reporting patterns on the backs of wafers and defects on the front
Inspected the chabmer.  The dome looks clear but there are small chunks of Si on the susceptor.  The chunks are probably what we are seeing on the back of user's wafers.  The chunks may also keep the wafers from sitting flat.
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We are doing a Mega Etch on the chamber and then will inspect again.




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