Shutdown epi2 SNF 2008-08-29 22:05:32: Pin tilt

slcheng at snf.stanford.edu slcheng at snf.stanford.edu
Fri Aug 29 22:05:36 PDT 2008

Previous message: Comment epi2 SNF 2008-08-29 15:58:45: Dome clear/small chunks on susceptor
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The susceptor is completely cleaned.
However, one of the pin tilts.
Probably need to open the chamber and change it.

Previous message: Comment epi2 SNF 2008-08-29 15:58:45: Dome clear/small chunks on susceptor
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