From gyama at snf.stanford.edu Mon Dec 1 12:51:52 2008 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Mon, 1 Dec 2008 12:51:52 -0800 Subject: Comment epi2 SNF 2008-12-01 12:51:52: is there a spare 1% Phosphine bottle? Message-ID: From gyama at snf.stanford.edu Mon Dec 1 13:02:31 2008 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Mon, 1 Dec 2008 13:02:31 -0800 Subject: Shutdown epi2 SNF 2008-12-01 13:02:31: ChA - no wafer on blade fault Message-ID: From maurice at snf.stanford.edu Tue Dec 2 14:14:54 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 2 Dec 2008 14:14:54 -0800 Subject: Shutdown epi2 SNF 2008-12-01 13:02:31: ChA - no wafer on blade fault Message-ID: Suscepter support replaced. It had sagged. Some coating on lower dome...should be cleaned over shutdown From maurice at snf.stanford.edu Tue Dec 2 17:26:50 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 2 Dec 2008 17:26:50 -0800 Subject: Shutdown epi2 SNF 2008-12-02 17:26:50: Wafer not centered in susceptor Message-ID: deposition not uniform...hazy From maurice at snf.stanford.edu Wed Dec 3 11:08:20 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 3 Dec 2008 11:08:20 -0800 Subject: Shutdown epi2 SNF 2008-12-02 17:26:50: Wafer not centered in susceptor Message-ID: Elmer adjusted robot arm extention steps and cycled several wafers through to visual verify the centering running big etch Gary will run a dummy run From maurice at snf.stanford.edu Wed Dec 3 11:32:44 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 3 Dec 2008 11:32:44 -0800 Subject: Shutdown epi2 SNF 2008-12-03 11:32:44: pressure deviation fault Message-ID: pressure not stabilizing at 600mtorr during "big etch". initially reaches 600 then pressure dropping below 400mtorr From maurice at snf.stanford.edu Wed Dec 3 16:20:13 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 3 Dec 2008 16:20:13 -0800 Subject: Shutdown epi2 SNF 2008-12-03 11:32:44: pressure deviation fault Message-ID: Elmer pulled and cleaned pressure control valve, ran a Big etch, a Si dep (looked good, haze free) and another big etch to verify pressure control. From maurice at snf.stanford.edu Wed Dec 3 16:20:52 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 3 Dec 2008 16:20:52 -0800 Subject: Problem epi2 SNF 2008-11-12 16:12:04: Chamber pressure Message-ID: Pulled and cleaned pressure control valve. From eenriquez at snf.stanford.edu Wed Dec 3 16:41:13 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 3 Dec 2008 16:41:13 -0800 Subject: Problem epi2 SNF 2008-12-03 16:41:13: Phosphine at order level Message-ID: Need to order spare 1% phosphine cylinder. From eenriquez at snf.stanford.edu Wed Dec 3 16:41:59 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 3 Dec 2008 16:41:59 -0800 Subject: Problem epi2 SNF 2008-10-31 23:16:54: unstable pressure Message-ID: Clean the throttle valve. From eenriquez at snf.stanford.edu Wed Dec 3 16:42:16 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 3 Dec 2008 16:42:16 -0800 Subject: Comment epi2 SNF 2008-10-28 15:51:33: inspected chamber Message-ID: Archived From eenriquez at snf.stanford.edu Wed Dec 3 16:42:25 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 3 Dec 2008 16:42:25 -0800 Subject: Comment epi2 SNF 2008-10-29 11:43:08: dome clear Message-ID: Archived From eenriquez at snf.stanford.edu Wed Dec 3 16:42:36 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 3 Dec 2008 16:42:36 -0800 Subject: Comment epi2 SNF 2008-10-31 10:35:48: dome clear Message-ID: Archived From eenriquez at snf.stanford.edu Wed Dec 3 16:42:49 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 3 Dec 2008 16:42:49 -0800 Subject: Comment epi2 SNF 2008-10-16 08:16:51: HCL Message-ID: Archived From rshyam at snf.stanford.edu Sat Dec 6 09:31:33 2008 From: rshyam at snf.stanford.edu (rshyam at snf.stanford.edu) Date: Sat, 6 Dec 2008 09:31:33 -0800 Subject: Comment epi2 SNF 2008-12-06 09:31:33: LLA cassette found sitting outside Message-ID: From slcheng at snf.stanford.edu Sun Dec 7 21:18:35 2008 From: slcheng at snf.stanford.edu (slcheng at snf.stanford.edu) Date: Sun, 7 Dec 2008 21:18:35 -0800 Subject: Problem epi2 SNF 2008-12-07 21:18:34: pressure stablization problem Message-ID: After GE ETCH COAT, pressure was not stablized. I ran 5 wafers today and it happened every time. It also happened once at the end of the process. It seems like 76 torr doen't work. From mdickey at snf.stanford.edu Mon Dec 8 06:02:06 2008 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 8 Dec 2008 06:02:06 -0800 Subject: Problem epi2 SNF 2008-12-08 06:02:05: Germane Message-ID: Germane is empty. No Germane available at this time From gyama at snf.stanford.edu Mon Dec 8 09:39:52 2008 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Mon, 8 Dec 2008 09:39:52 -0800 Subject: Shutdown epi2 SNF 2008-12-08 09:39:51: took wafer from B LL, says no wafer on blade Message-ID: shutting down to cold idle From mdickey at snf.stanford.edu Mon Dec 8 11:04:01 2008 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 8 Dec 2008 11:04:01 -0800 Subject: Comment epi2 SNF 2008-12-08 11:04:01: Germane Message-ID: Germane is due in tomorrow From eenriquez at snf.stanford.edu Mon Dec 8 11:22:02 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 8 Dec 2008 11:22:02 -0800 Subject: Shutdown epi2 SNF 2008-12-08 09:39:51: took wafer from B LL, says no wafer on blade Message-ID: Recovered the wafer from the chamber. From maurice at snf.stanford.edu Tue Dec 9 16:06:21 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 9 Dec 2008 16:06:21 -0800 Subject: Comment epi2 SNF 2008-12-09 16:06:21: Germane update Message-ID: The Epi Ge bottle was expected today but it had a Disc instead of a CGA fitting. We expect the bottle to arrive tomorrow with the correct fitting. From eenriquez at snf.stanford.edu Wed Dec 10 17:19:04 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 10 Dec 2008 17:19:04 -0800 Subject: Problem epi2 SNF 2008-12-08 06:02:05: Germane Message-ID: Ray and Ted installed new cylinder. Helium leak checked the gas panel. Flowed max flow at the system for 1 min with no problems. From eenriquez at snf.stanford.edu Wed Dec 10 17:19:29 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 10 Dec 2008 17:19:29 -0800 Subject: Comment epi2 SNF 2008-12-08 11:04:01: Germane Message-ID: Archived From eenriquez at snf.stanford.edu Wed Dec 10 17:19:44 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 10 Dec 2008 17:19:44 -0800 Subject: Comment epi2 SNF 2008-12-09 16:06:21: Germane update Message-ID: Ray and Ted installed new cylinder. Helium leak checked the gas panel. Flowed max flow at the system for 1 min with no problems. From slcheng at snf.stanford.edu Thu Dec 11 18:26:20 2008 From: slcheng at snf.stanford.edu (slcheng at snf.stanford.edu) Date: Thu, 11 Dec 2008 18:26:20 -0800 Subject: Problem epi2 SNF 2008-12-11 18:26:19: Worse pressure problem Message-ID: It is hard to stablize the pressure higher than 50 torr. Wafer transfer problems happened more often than before. 50 torr annealing is used for my process. Therefore, i found it unstable during the annealing. I think it will getting worse and eventuly we will not be able to do our low pressure deposition. From masaharu at snf.stanford.edu Fri Dec 12 14:59:52 2008 From: masaharu at snf.stanford.edu (masaharu at snf.stanford.edu) Date: Fri, 12 Dec 2008 14:59:52 -0800 Subject: Shutdown epi2 SNF 2008-12-12 14:59:51: bulb failure Message-ID: Upper inner/outer bulb failure. Elmber will generously come to SNF and replace buls tomorrow some time. We really appreciate his kindness!! From maurice at snf.stanford.edu Sat Dec 13 09:37:13 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sat, 13 Dec 2008 09:37:13 -0800 Subject: Shutdown epi2 SNF 2008-12-12 14:59:51: bulb failure Message-ID: 13 upper bulbs replaced. Ran the Ge etch program with no problems. From maurice at snf.stanford.edu Sat Dec 13 09:39:17 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sat, 13 Dec 2008 09:39:17 -0800 Subject: Problem epi2 SNF 2008-12-11 18:26:19: Worse pressure problem Message-ID: EE adjusted pressure PID values...seems to better...please report if it continues to be a problem From maurice at snf.stanford.edu Sat Dec 13 09:39:35 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sat, 13 Dec 2008 09:39:35 -0800 Subject: Problem epi2 SNF 2008-12-07 21:18:34: pressure stablization problem Message-ID: EE adjusted pressure PID values...seems to better...please report if it continues to be a problem