Problem epi2 SNF 2008-02-02 09:35:38: epi2 still unusable
ehe at snf.stanford.edu
ehe at snf.stanford.edu
Sat Feb 2 09:35:39 PST 2008
I think epi2 is really down... noticed another error message to add to last log: "Chamber A upper pyrometer unhooked error". I don't know if epi2 has backup pyrometers but if not, nobody can do processing without upper chamber temperature monitoring (software probably wouldn't allow it). But, I won't shut it down in case I'm wrong.
More information about the epi2-pcs
mailing list