Problem epi2 SNF 2008-02-04 07:26:38: wafer is stuck at LLA

masaharu at snf.stanford.edu masaharu at snf.stanford.edu
Mon Feb 4 07:26:38 PST 2008


The system detected wafer slide when I run a wafer.
The slit between LLA and xfer chamber is not closed.
Sorry for the inconvinience.
I think the cause might be that I set casette incorrectly in LLA.




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