Shutdown epi2 SNF 2008-02-04 08:10:10: wafer stuck

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon Feb 4 08:45:29 PST 2008


LLA detected the wafer slid, system would not allow the slit valve to close.  Verified that no wafer was in the slit valve and closed the valve using the Dig I/O.  Vented the loadlock and found that wafer 1 was not flat aligned.  Flat aligned the wafer and left the user's wafers in the LL.




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