Problem epi2 SNF 2008-02-04 09:26:33: wafer stuck again....

masaharu at snf.stanford.edu masaharu at snf.stanford.edu
Mon Feb 4 09:26:34 PST 2008


When I run a wafer,
The error "system cabinet open" showed up.
I couldn't transfer wafer, so wafer is still inside chamber A.
Sorry for inconvinience.
Elmer: could you please deal with it? Thank you.




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