Problem epi2 SNF 2008-02-13 19:24:07: d-dop1 low flow
ehe at snf.stanford.edu
ehe at snf.stanford.edu
Wed Feb 13 19:24:07 PST 2008
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Problem epi2 SNF 2008-02-08 14:44:22: No Low P dopant
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Problem epi2 SNF 2008-02-13 19:24:07: d-dop1 low flow
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flow rate ~3sccm, setpoint 80sccm (error msg: deviated 96%)
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Problem epi2 SNF 2008-02-08 14:44:22: No Low P dopant
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Problem epi2 SNF 2008-02-13 19:24:07: d-dop1 low flow
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