Problem epi2 SNF 2008-02-13 19:24:07: d-dop1 low flow

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Thu Feb 14 08:21:53 PST 2008


The dopant selector valve in the valve box had been switched to Arsine instead of phosphine.  Arsine line is still under vacuum and has never been used.




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