Shutdown epi2 SNF 2008-02-17 07:17:33: Wafer slide detected

rshyam at snf.stanford.edu rshyam at snf.stanford.edu
Sun Feb 17 07:17:34 PST 2008


After end of recipe when wafer was moving from Ch.F to LLA, it gave a 'wafer slide detected' error and refused to close LLA slit. I tried using LLB but it gives 'LLA slit open' error. (refuses to open LLB slit while LLA slit is open)




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