Shutdown epi2 SNF 2008-02-19 17:59:24: Same 'wafer slide detected' error

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Wed Feb 20 07:49:16 PST 2008


Closed the slit valve using the DI/DO.  Found wafer 1 not flat aligned.




More information about the epi2-pcs mailing list