Comment epi2 SNF 2008-02-20 19:09:37: HCl cylinder change
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Wed Feb 20 19:09:38 PST 2008
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Shutdown epi2 SNF 2008-02-19 17:59:24: Same 'wafer slide detected' error
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Comment epi2 SNF 2008-02-20 19:09:37: HCl cylinder change
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16 lbs of HCl left in the old cylinder
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Shutdown epi2 SNF 2008-02-19 17:59:24: Same 'wafer slide detected' error
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Comment epi2 SNF 2008-02-20 19:09:37: HCl cylinder change
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