Shutdown epi2 SNF 2008-02-20 23:17:28: Wafer slide error

renshen at snf.stanford.edu renshen at snf.stanford.edu
Wed Feb 20 23:17:29 PST 2008


Wafer slide error occured during the unloading of my first wafer. The same kind of error that we had earlier this week. Tool will be down till error cleared. 




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