Shutdown epi2 SNF 2008-02-21 22:49:39: Load lock A problem

yuhykr at snf.stanford.edu yuhykr at snf.stanford.edu
Thu Feb 21 22:49:39 PST 2008

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The blade doesn't sense my wafer...
We should shut down load lock A. When I check the load lock B, it is ok...

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