Shutdown epi2 SNF 2008-02-21 22:49:39: Load lock A problem

yuhykr at snf.stanford.edu yuhykr at snf.stanford.edu
Thu Feb 21 22:49:39 PST 2008


The blade doesn't sense my wafer...
We should shut down load lock A. When I check the load lock B, it is ok...




More information about the epi2-pcs mailing list