Problem epi2 SNF 2008-02-25 14:01:50: wafer transfer error

munehiro at snf.stanford.edu munehiro at snf.stanford.edu
Mon Feb 25 14:01:50 PST 2008


"Wafer too far off center for centerfinder to correct"
The wafer stoped in tranfer chamber.
It needed to abort automaticmode.




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