Comment epi2 SNF 2008-02-28 14:49:58: Update
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Thu Feb 28 14:49:58 PST 2008
Handling problem. Wafer does load into the chamber. Need to rotate the susceptor support 180 deg.
More information about the epi2-pcs
mailing list