Comment epi2 SNF 2008-02-29 14:47:31: Handling update

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Fri Feb 29 14:47:34 PST 2008


Rotated the susceptor support 180 deg and was able to cycle several wafer but lost a wafer when I started cycling wafers when the chamber was hot.  Found the wafer broken in the chamber with most of the pieces in the transfer chamber.  Need to troubleshoot further.




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