February 2008 Archives by subject

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Starting: Fri Feb 1 12:03:28 PST 2008
Ending: Fri Feb 29 14:47:34 PST 2008
Messages: 57

Comment epi2 SNF 2008-01-31 10:17:29: Changed HCl cylinder eenriquez at snf.stanford.edu
Comment epi2 SNF 2008-01-31 10:17:29: Changed HCl cylinder eenriquez at snf.stanford.edu
Comment epi2 SNF 2008-02-03 20:20:23: transfer chamber was not online masaharu at snf.stanford.edu
Comment epi2 SNF 2008-02-03 20:20:23: transfer chamber was not online eenriquez at snf.stanford.edu
Comment epi2 SNF 2008-02-07 08:44:32: HCl cylinder change eenriquez at snf.stanford.edu
Comment epi2 SNF 2008-02-07 08:44:32: HCl cylinder change maurice at snf.stanford.edu
Comment epi2 SNF 2008-02-14 12:02:14: Dope1---Arsine 100ppm maurice at snf.stanford.edu
Comment epi2 SNF 2008-02-14 12:02:14: Dope1---Arsine 100ppm maurice at snf.stanford.edu
Comment epi2 SNF 2008-02-14 18:29:16: Dope1---PH3 munehiro at snf.stanford.edu
Comment epi2 SNF 2008-02-14 18:29:16: Dope1---PH3 maurice at snf.stanford.edu
Comment epi2 SNF 2008-02-15 10:13:22: switched DOP1 to arsine ehe at snf.stanford.edu
Comment epi2 SNF 2008-02-15 10:13:22: switched DOP1 to arsine maurice at snf.stanford.edu
Comment epi2 SNF 2008-02-20 19:09:37: HCl cylinder change eenriquez at snf.stanford.edu
Comment epi2 SNF 2008-02-20 19:09:37: HCl cylinder change maurice at snf.stanford.edu
Comment epi2 SNF 2008-02-22 09:50:38: AMAT here to work on handling issue maurice at snf.stanford.edu
Comment epi2 SNF 2008-02-22 09:50:38: AMAT here to work on handling issue maurice at snf.stanford.edu
Comment epi2 SNF 2008-02-27 19:23:22: Update eenriquez at snf.stanford.edu
Comment epi2 SNF 2008-02-28 14:11:19: Diborane mdickey at snf.stanford.edu
Comment epi2 SNF 2008-02-28 14:49:58: Update eenriquez at snf.stanford.edu
Comment epi2 SNF 2008-02-29 10:28:49: Diborane mdickey at snf.stanford.edu
Comment epi2 SNF 2008-02-29 14:47:31: Handling update eenriquez at snf.stanford.edu
Problem epi2 SNF 2008-01-31 19:36:26: temperature problem maurice at snf.stanford.edu
Problem epi2 SNF 2008-02-01 18:57:24: Chanber A air blowing has no air flow munehiro at snf.stanford.edu
Problem epi2 SNF 2008-02-01 18:57:24: Chanber A air blowing has no air flow maurice at snf.stanford.edu
Problem epi2 SNF 2008-02-02 09:35:38: epi2 still unusable ehe at snf.stanford.edu
Problem epi2 SNF 2008-02-02 09:35:38: epi2 still unusable maurice at snf.stanford.edu
Problem epi2 SNF 2008-02-03 09:24:11: xfer chamber pressure ofidaner at snf.stanford.edu
Problem epi2 SNF 2008-02-03 09:24:11: xfer chamber pressure eenriquez at snf.stanford.edu
Problem epi2 SNF 2008-02-04 07:26:38: wafer is stuck at LLA masaharu at snf.stanford.edu
Problem epi2 SNF 2008-02-04 07:26:38: wafer is stuck at LLA eenriquez at snf.stanford.edu
Problem epi2 SNF 2008-02-04 09:26:33: wafer stuck again.... masaharu at snf.stanford.edu
Problem epi2 SNF 2008-02-04 09:26:33: wafer stuck again.... eenriquez at snf.stanford.edu
Problem epi2 SNF 2008-02-07 11:34:53: NO GeH4 maurice at snf.stanford.edu
Problem epi2 SNF 2008-02-07 11:34:53: NO GeH4 eenriquez at snf.stanford.edu
Problem epi2 SNF 2008-02-07 21:24:22: Set pt deviation error rik at snf.stanford.edu
Problem epi2 SNF 2008-02-07 21:24:22: Set pt deviation error maurice at snf.stanford.edu
Problem epi2 SNF 2008-02-08 14:44:22: No Low P dopant maurice at snf.stanford.edu
Problem epi2 SNF 2008-02-13 19:24:07: d-dop1 low flow ehe at snf.stanford.edu
Problem epi2 SNF 2008-02-13 19:24:07: d-dop1 low flow eenriquez at snf.stanford.edu
Problem epi2 SNF 2008-02-14 08:59:13: arsine? ehe at snf.stanford.edu
Problem epi2 SNF 2008-02-14 08:59:13: arsine? maurice at snf.stanford.edu
Problem epi2 SNF 2008-02-25 14:01:50: wafer transfer error munehiro at snf.stanford.edu
Problem epi2 SNF 2008-02-26 09:26:19: Handling issues reported on A side mtang at snf.stanford.edu
Problem epi2 SNF 2008-02-26 18:10:24: Water leak mtang at snf.stanford.edu
Problem epi2 SNF 2008-02-26 18:10:24: Water leak maurice at snf.stanford.edu
Shutdown epi2 SNF 2008-01-31 19:51:30: bad temperature control maurice at snf.stanford.edu
Shutdown epi2 SNF 2008-02-04 08:10:10: wafer stuck masaharu at snf.stanford.edu
Shutdown epi2 SNF 2008-02-04 08:10:10: wafer stuck eenriquez at snf.stanford.edu
Shutdown epi2 SNF 2008-02-17 07:17:33: Wafer slide detected rshyam at snf.stanford.edu
Shutdown epi2 SNF 2008-02-17 07:17:33: Wafer slide detected eenriquez at snf.stanford.edu
Shutdown epi2 SNF 2008-02-19 17:59:24: Same 'wafer slide detected' error rshyam at snf.stanford.edu
Shutdown epi2 SNF 2008-02-19 17:59:24: Same 'wafer slide detected' error eenriquez at snf.stanford.edu
Shutdown epi2 SNF 2008-02-20 23:17:28: Wafer slide error renshen at snf.stanford.edu
Shutdown epi2 SNF 2008-02-20 23:17:28: Wafer slide error maurice at snf.stanford.edu
Shutdown epi2 SNF 2008-02-21 22:49:39: Load lock A problem yuhykr at snf.stanford.edu
Shutdown epi2 SNF 2008-02-21 22:49:39: Load lock A problem maurice at snf.stanford.edu
Shutdown epi2 SNF 2008-02-26 17:13:43: Dome coated maurice at snf.stanford.edu

Last message date: Fri Feb 29 14:47:34 PST 2008
Archived on: Sun Dec 23 08:52:48 PST 2012

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