From eenriquez at snf.stanford.edu Thu Jan 3 10:39:45 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 3 Jan 2008 10:39:45 -0800 Subject: Shutdown epi2 SNF 2008-01-03 10:39:45: Insufficient house exhaust Message-ID: Unable to turn on the scrubber and burnbox because of insufficient house exhaust. From eenriquez at snf.stanford.edu Thu Jan 3 14:11:50 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 3 Jan 2008 14:11:50 -0800 Subject: Shutdown epi2 SNF 2008-01-03 10:39:45: Insufficient house exhaust Message-ID: House exhaust is OK now. From eenriquez at snf.stanford.edu Thu Jan 3 15:10:24 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 3 Jan 2008 15:10:24 -0800 Subject: Shutdown epi2 SNF 2008-01-03 15:10:24: Errors for no blower air flow Message-ID: Blower is on and properly installed but still errors for no air flow. Will check the sensor and cable tomorrow. From eenriquez at snf.stanford.edu Fri Jan 4 14:04:12 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 4 Jan 2008 14:04:12 -0800 Subject: Shutdown epi2 SNF 2008-01-03 15:10:24: Errors for no blower air flow Message-ID: Found the pneumatic line to air sensor was kinked. Straigntened out line. Also had low water faults. Increased water flow to the sensor and adjusted the flow sensor. From mtang at snf.stanford.edu Thu Jan 10 09:07:23 2008 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Thu, 10 Jan 2008 09:07:23 -0800 Subject: Problem epi2 SNF 2007-12-18 21:01:17: Temperature controller problem Message-ID: No one else has reported this problem. If you encounter it, please report. From mtang at snf.stanford.edu Thu Jan 10 09:08:13 2008 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Thu, 10 Jan 2008 09:08:13 -0800 Subject: Problem epi2 SNF 2007-11-05 12:22:22: Pressure Setpoint deviation fault Message-ID: No observed since then. Please report if you observe it. From mtang at snf.stanford.edu Thu Jan 10 09:08:39 2008 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Thu, 10 Jan 2008 09:08:39 -0800 Subject: Problem epi2 SNF 2007-11-04 12:28:59: chamber A pump valve not work? Message-ID: Problem not observed since. Please report if you see it. From eenriquez at snf.stanford.edu Mon Jan 14 11:10:10 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 14 Jan 2008 11:10:10 -0800 Subject: Comment epi2 SNF 2008-01-14 11:10:09: HCl cylinder change Message-ID: Replaced HCl cylinder. From munehiro at snf.stanford.edu Tue Jan 15 13:30:48 2008 From: munehiro at snf.stanford.edu (munehiro at snf.stanford.edu) Date: Tue, 15 Jan 2008 13:30:48 -0800 Subject: Shutdown epi2 SNF 2008-01-15 13:30:48: wafer lost Message-ID: When the wafer unloaded from chamber A, the blade lost the wafer. From eenriquez at snf.stanford.edu Tue Jan 15 14:45:03 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 15 Jan 2008 14:45:03 -0800 Subject: Shutdown epi2 SNF 2008-01-15 13:30:48: wafer lost Message-ID: Vented the chamber and recovered wafer. Chamber is now on Hot idle. Will ask Maurice to cycle wafers and run a test. From eenriquez at snf.stanford.edu Tue Jan 15 14:45:49 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 15 Jan 2008 14:45:49 -0800 Subject: Comment epi2 SNF 2008-01-15 14:45:48: Need to cycle wafers and run a test. Message-ID: From yuhykr at snf.stanford.edu Tue Jan 15 20:03:06 2008 From: yuhykr at snf.stanford.edu (yuhykr at snf.stanford.edu) Date: Tue, 15 Jan 2008 20:03:06 -0800 Subject: Shutdown epi2 SNF 2008-01-15 20:03:06: no wafer on the blade Message-ID: Couldn't unload wafer From cbaxter at snf.stanford.edu Wed Jan 16 11:37:45 2008 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 16 Jan 2008 11:37:45 -0800 Subject: Comment epi2 SNF 2008-01-16 11:37:44: Stuck wafer. Message-ID: Was able to get wafer out from the chamber w/out opening the chamber. I ignore vacuum and vented the transfer l/l and opened the slit door, wafer was near to the slit door and was able pulled it out. I transfered wafer on manual mode w/out problem, still need to check handoff by running a actual process. From maurice at snf.stanford.edu Wed Jan 16 14:53:28 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 16 Jan 2008 14:53:28 -0800 Subject: Comment epi2 SNF 2008-01-15 14:45:48: Need to cycle wafers and run a test. Message-ID: wafers cycled...seems ok From maurice at snf.stanford.edu Wed Jan 16 14:54:32 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 16 Jan 2008 14:54:32 -0800 Subject: Shutdown epi2 SNF 2008-01-15 20:03:06: no wafer on the blade Message-ID: CB opened up transfer chamber and removed wafer. Wafers were cycled and system ran fine From maurice at snf.stanford.edu Wed Jan 16 14:54:42 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 16 Jan 2008 14:54:42 -0800 Subject: Comment epi2 SNF 2008-01-16 11:37:44: Stuck wafer. Message-ID: CB opened up transfer chamber and removed wafer. Wafers were cycled and system ran fine From rshyam at snf.stanford.edu Wed Jan 16 19:04:45 2008 From: rshyam at snf.stanford.edu (rshyam at snf.stanford.edu) Date: Wed, 16 Jan 2008 19:04:45 -0800 Subject: Problem epi2 SNF 2008-01-16 19:04:45: no air flow Message-ID: when going from cold idle to hot idle during startup, the machine gave a 'no air flow' error in addition to the usual 'low water flow' error. this error persisted even on returning to inert idle state. i tried bringing the chamber offline and back online. but during both operations, it failed during the 'pumpdown' stage stating that it is unable to pump down to 2 torr. From rshyam at snf.stanford.edu Wed Jan 16 19:07:38 2008 From: rshyam at snf.stanford.edu (rshyam at snf.stanford.edu) Date: Wed, 16 Jan 2008 19:07:38 -0800 Subject: Shutdown epi2 SNF 2008-01-16 19:07:38: see problem report above Message-ID: chamber is unable to come back online without passing the pumpdown stage of the online procedure. From maurice at snf.stanford.edu Thu Jan 17 10:00:32 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 17 Jan 2008 10:00:32 -0800 Subject: Shutdown epi2 SNF 2008-01-16 19:07:38: see problem report above Message-ID: Elmer adjusted blower cover and sensor From maurice at snf.stanford.edu Thu Jan 17 10:00:41 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 17 Jan 2008 10:00:41 -0800 Subject: Problem epi2 SNF 2008-01-16 19:04:45: no air flow Message-ID: Elmer adjusted blower cover and sensor From skoh at snf.stanford.edu Fri Jan 18 12:14:41 2008 From: skoh at snf.stanford.edu (skoh at snf.stanford.edu) Date: Fri, 18 Jan 2008 12:14:41 -0800 Subject: Problem epi2 SNF 2008-01-18 12:14:41: Load lock A stepper failed Message-ID: Unable to pump load lock A. 4 wafers left in load lock A. From maurice at snf.stanford.edu Fri Jan 18 14:27:35 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 18 Jan 2008 14:27:35 -0800 Subject: Problem epi2 SNF 2008-01-18 12:14:41: Load lock A stepper failed Message-ID: load lock "Homed" From ofidaner at snf.stanford.edu Fri Jan 18 19:31:14 2008 From: ofidaner at snf.stanford.edu (ofidaner at snf.stanford.edu) Date: Fri, 18 Jan 2008 19:31:14 -0800 Subject: Problem epi2 SNF 2008-01-18 19:31:12: manual mode only Message-ID: use it in the manual mode; do not use LLB. For details see my email. From yuhykr at snf.stanford.edu Thu Jan 24 22:24:29 2008 From: yuhykr at snf.stanford.edu (yuhykr at snf.stanford.edu) Date: Thu, 24 Jan 2008 22:24:29 -0800 Subject: Shutdown epi2 SNF 2008-01-24 22:24:29: chamber A main scrubber failure Message-ID: From mdickey at snf.stanford.edu Fri Jan 25 06:10:19 2008 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 25 Jan 2008 06:10:19 -0800 Subject: Comment epi2 SNF 2008-01-25 06:10:19: HCL Message-ID: Needs HCL bottle change From eenriquez at snf.stanford.edu Fri Jan 25 08:52:05 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 25 Jan 2008 08:52:05 -0800 Subject: Comment epi2 SNF 2008-01-25 06:10:19: HCL Message-ID: Completed HCl cylinder change. From eenriquez at snf.stanford.edu Fri Jan 25 09:34:46 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 25 Jan 2008 09:34:46 -0800 Subject: Shutdown epi2 SNF 2008-01-24 22:24:29: chamber A main scrubber failure Message-ID: Reset the burn box. Moved user's wafer from the chamber into LLA. Left chamber in Hot idle. From masaharu at snf.stanford.edu Mon Jan 28 01:16:07 2008 From: masaharu at snf.stanford.edu (masaharu at snf.stanford.edu) Date: Mon, 28 Jan 2008 01:16:07 -0800 Subject: Shutdown epi2 SNF 2008-01-28 01:16:06: Heater contactor off and low water flow Message-ID: I saw the problem of Heater contactor and low water flow from the begining. I think previous user saw this problem already from the fault screen. Please report it. From eenriquez at snf.stanford.edu Mon Jan 28 10:45:45 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 28 Jan 2008 10:45:45 -0800 Subject: Shutdown epi2 SNF 2008-01-28 01:16:06: Heater contactor off and low water flow Message-ID: Adjusted water flow switch #3. From munehiro at snf.stanford.edu Tue Jan 29 09:43:54 2008 From: munehiro at snf.stanford.edu (munehiro at snf.stanford.edu) Date: Tue, 29 Jan 2008 09:43:54 -0800 Subject: Shutdown epi2 SNF 2008-01-29 09:43:53: Pointer problem Message-ID: From maurice at snf.stanford.edu Tue Jan 29 12:00:21 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 29 Jan 2008 12:00:21 -0800 Subject: Shutdown epi2 SNF 2008-01-29 09:43:53: Pointer problem Message-ID: pointer reset From maurice at snf.stanford.edu Wed Jan 30 18:01:53 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 30 Jan 2008 18:01:53 -0800 Subject: Problem epi2 SNF 2008-01-18 19:31:12: manual mode only Message-ID: Elmer reset the system. The loadlock B is now working. Automatic mode is also working From maurice at snf.stanford.edu Wed Jan 30 18:02:19 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 30 Jan 2008 18:02:19 -0800 Subject: Comment epi2 SNF 2008-01-14 11:10:09: HCl cylinder change Message-ID: logged From eenriquez at snf.stanford.edu Thu Jan 31 10:17:30 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 31 Jan 2008 10:17:30 -0800 Subject: Comment epi2 SNF 2008-01-31 10:17:29: Changed HCl cylinder Message-ID: From ehe at snf.stanford.edu Thu Jan 31 19:36:26 2008 From: ehe at snf.stanford.edu (ehe at snf.stanford.edu) Date: Thu, 31 Jan 2008 19:36:26 -0800 Subject: Problem epi2 SNF 2008-01-31 19:36:26: temperature problem Message-ID: Could not run my recipes - temperatures would not stay near set point. For example, in a recipe that doesn't have any steps above 500C, after a stabilization step, upper chamber deviated to 624C while lower chamber was at 496C, causing recipe to abort. From ehe at snf.stanford.edu Thu Jan 31 19:51:30 2008 From: ehe at snf.stanford.edu (ehe at snf.stanford.edu) Date: Thu, 31 Jan 2008 19:51:30 -0800 Subject: Shutdown epi2 SNF 2008-01-31 19:51:30: bad temperature control Message-ID: Each time I tried, my recipe aborted due to temperature out of range. I tried increasing the stabilization step to >5minutes, that didn't help. For example, after long 500C stabilization step, during 500C deposition the upper chamber temperature reached 624C with lower chamber temperature still ~500C. None of my recipes could run either due to low or high temperatures out of range.