Shutdown epi2 SNF 2008-01-15 13:30:48: wafer lost

munehiro at snf.stanford.edu munehiro at snf.stanford.edu
Tue Jan 15 13:30:48 PST 2008

Previous message: Comment epi2 SNF 2008-01-14 11:10:09: HCl cylinder change
Next message: Shutdown epi2 SNF 2008-01-15 13:30:48: wafer lost
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

When the wafer unloaded from chamber A, the blade lost the wafer.

Previous message: Comment epi2 SNF 2008-01-14 11:10:09: HCl cylinder change
Next message: Shutdown epi2 SNF 2008-01-15 13:30:48: wafer lost
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the epi2-pcs mailing list