Shutdown epi2 SNF 2008-01-15 13:30:48: wafer lost

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Tue Jan 15 14:45:03 PST 2008


Vented the chamber and recovered wafer.  Chamber is now on Hot idle.  Will ask Maurice to cycle wafers and run a test.




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