Shutdown epi2 SNF 2008-01-15 13:30:48: wafer lost
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Tue Jan 15 14:45:03 PST 2008
Vented the chamber and recovered wafer. Chamber is now on Hot idle. Will ask Maurice to cycle wafers and run a test.
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