Shutdown epi2 SNF 2008-01-15 20:03:06: no wafer on the blade
yuhykr at snf.stanford.edu
yuhykr at snf.stanford.edu
Tue Jan 15 20:03:06 PST 2008
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Comment epi2 SNF 2008-01-15 14:45:48: Need to cycle wafers and run a test.
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Shutdown epi2 SNF 2008-01-15 20:03:06: no wafer on the blade
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Couldn't unload wafer
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Comment epi2 SNF 2008-01-15 14:45:48: Need to cycle wafers and run a test.
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Shutdown epi2 SNF 2008-01-15 20:03:06: no wafer on the blade
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