Comment epi2 SNF 2008-01-16 11:37:44: Stuck wafer.

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Wed Jan 16 11:37:45 PST 2008


Was able to get wafer out from the chamber w/out 
opening the chamber. I ignore vacuum and vented the
transfer l/l and opened the slit door, wafer was near to the
slit door and was able pulled it out. I transfered wafer on
manual mode w/out problem, still need to check handoff
by running a actual process.




More information about the epi2-pcs mailing list