Problem epi2 SNF 2008-01-16 19:04:45: no air flow

rshyam at snf.stanford.edu rshyam at snf.stanford.edu
Wed Jan 16 19:04:45 PST 2008


when going from cold idle to hot idle during startup, the machine gave a 'no air flow' error in addition to the usual 'low water flow' error. this error persisted even on returning to inert idle state. i tried bringing the chamber offline and back online. but during both operations, it failed during the 'pumpdown' stage stating that it is unable to pump down to 2 torr.




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