Shutdown epi2 SNF 2008-01-24 22:24:29: chamber A main scrubber failure
yuhykr at snf.stanford.edu
yuhykr at snf.stanford.edu
Thu Jan 24 22:24:29 PST 2008
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Problem epi2 SNF 2008-01-18 19:31:12: manual mode only
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Shutdown epi2 SNF 2008-01-24 22:24:29: chamber A main scrubber failure
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