Shutdown epi2 SNF 2008-01-24 22:24:29: chamber A main scrubber failure

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Fri Jan 25 09:34:46 PST 2008


Reset the burn box.  Moved user's wafer from the chamber into LLA.  Left chamber in Hot idle.




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